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Scalability of TiN/HfAlO/TiN MIM DRAM capacitor to 0.7-nm-EOT …
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Scalability of TiN/HfAlO/TiN MIM DRAM capacitor to 0.7-nm-EOT and beyond | Semantic Scholar
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Scalability of TiN/HfAlO/TiN MIM DR…
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Scalability of TiN/HfAlO/TiN MIM DRAM capacitor to 0.7-nm-EOT and beyond | Sem…

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