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Laser spike annealing is a millisecond annealing technology used in front-end semiconductor manufacturing to lower the resistance of key transistor structures by activating dopants.
Veeco’s Laser Annealing portfolio also includes its NSA500 system, which extends annealing capabilities to low thermal budget applications, like Backside Power Delivery and Contact Annealing for ...
Veeco’s laser annealing technology was the leading contributor to record semiconductor revenue in 2021. In late 2021, Veeco announced it had shipped its first laser annealing system from their ...
A group of scientists from the Technical University of Denmark has fabricated a solar cell based on selenium by replacing thermal annealing with a new laser-annealing strategy.
Veeco’s Laser Annealing portfolio also includes its NSA500 system, which extends annealing capabilities to low thermal budget applications, like Backside Power Delivery and Contact Annealing for ...
Laser spike annealing is a millisecond annealing technology used in front-end semiconductor manufacturing to lower the resistance of key transistor structures by activating dopants. Veeco's LSA system ...