In this work, a monolithic tri-axis MEMS gyroscope is realized through a TSMC SOI-MEMS platform and the device is characterized in ambient pressure. To fully make use of the limited chip area, the ...

We present a new mathematical model for a vibrating ring gyroscope (VRG) in the presence of imperfections, namely, structural defects and material anisotropy. As a novelty, we calculate the mode ...

Innovative workflow measures micromirror deformation across full deflection range, improving MEMS design through advanced resonance frequency characterization.

Alongside its advanced accelerometer architecture, the LSM6DSV80X also integrates a MEMS gyroscope and digital processing ...

I've built a Control Moment Gyro which uses a solid state IMU to measure the angle of roll of the whole device, and then tilts a physical spinning gyro powered by a brushless motor, so cause a ...