Therefore, the proposed dc-offset eliminating method can be easily embedded in different phase-shift modulation methods, such as single-phase-shift, double-phase-shift, and triple-phase-shift methods.

Lithography hotspot detection is one of the fundamental steps in physical verification. Due to the increasingly complicated design patterns, early and quick feedback for lithography hotspots is ...

When the lithography machine is running, the heat generated is quickly transferred to the silicon carbide water-cooled ...